Detector Microfabrication Facility

Project consisted of building out 5,500 square feet of shell space into an ISO-5 (Class 100) cleanroom and support spaces on the first floor of an existing building at SLAC’s Menlo Park Campus. Scope included installing new roof top units, an acid waste neutralization system, an ultra-pure water system, toxic gas safety cabinets, as well as the electrical, mechanical, and specialty process piping. The tool hook-up portion included making final mechanical, electrical, specialty process piping and structural anchorage connections to (30) thirty owner provided specialty tools while maintaining an ISO-5 (Class 100) classification.