Detector Microfabrication Facility

The Detector Microfabrication Facility (DMF For Short) is a new 5,500 SF Class 100 (ISO 5) Cleanroom. This facility is constructed out of modular clean room walls and ceilings with a universal strut grid on deck to support various MEP utilities. The facility is capable of accommodating 6 fabrication lines for processing TES detectors, SQUIDS and networked quantum devices across 150 mm wafers. The DMF requires all new MEP as it is being constructed within an existing shell space. Mechanical equipment is split up with new air handler and exhaust fans on roof and associated chiller and boiler in the mechanical yard. Minor structural upgrades are required to accommodate new equipment accordingly. A new RODI System will be installed to support the DMF as well as an N2 generator. All other utilities will be tied into house lines and hooked up to owner furnished equipment as part of the project. This is a fully validated and commissioned project to ensure compliance with ISO5 guidelines.